EDS Detector Type:  Silicon Drift Detector (SDD)

Detector Active Area: 25 mm2

X-ray Window: Ultra-thin Si3N4 allowing detection from B to Am

Energy Resolution: 137 eV @ Mn K-alpha

Max Input Countrate: 300,000 cps

Export Formats: .CSV, DOCX

EDS Map Resolution: 16x16- 512x512 pixels

Pixel Dwell Time: 10-250 ms

Linescan Resolution: 16-512 pixels

Points Dwell Time Range: 50-250 ms

Total Number of Lines: 12

Optical Camera Magnification:  3-16X

Electron Microscope Magnification:80-100,000X

Accelerating Voltages:5, 10, 15, 20 kV

Resolution: 14 nm

Detectors:Backscatter Detector, Secondary Detector (hi vac only)

Image Formats:JPEG, TIFF, BMP

Image Resolution: 456x456, 684x684, 1024x1024 and 2048x2048

Sample Size:Max. 100 mm x 100 mm (up to 36 1/2" pin stubs)

Sample Height: Max. 65 mm

Scan Area: 100 mm x 100 mm

Sample Loading Time: <5 sec (optical), <60 sec (SEM)

Phenom XL Specifications

The Phenom XL is the World's most advanced tabletop Scanning Electron Microscope (SEM). With the same great imaging and high brightness CeB6 source as the Phenom Pro X platform, the XL adds the ability to analyze samples up to 100 mm x 100 mm.  The small footprint and fast pump down time (<1 minute from sample insertion to imaging) makes this system versatile for most any application. Emit, LLC offers Phenom XL systems which include the optional Secondary Electron Detector for improved imaging of surface topography at low accelerating voltages.  All of our systems are equipped with Energy Dispersive Spectrometers (EDS) for chemical analysis.

EDS Specifications

SEM Specifications